검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fabrication of silicon stencil masks with vitreous carbon ion-absorbing coatings Ruchhoeft P, Wolfe JC, Wasson J, Torres J, Wu H, Nounu H, Liu N, Herbordt M, Morgan MD, Tiberio RC Journal of Vacuum Science & Technology B, 16(6), 3599, 1998 |
| 2 |
Ion absorbing stencil mask coatings for ion beam lithography Wasson JR, Torres JL, Rampersad HR, Wolfe JC, Ruchhoeft P, Herbordt M, Loschner H Journal of Vacuum Science & Technology B, 15(6), 2214, 1997 |