화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
Lindsay R, Henson K, Vandervorst W, Maex K, Pawlak BJ, Duffy R, Surdeanu R, Stolk P, Kittl JA, Giangrandi S, Pages X, van der Jeugd K
Journal of Vacuum Science & Technology B, 22(1), 306, 2004
2 An effective model for analysing tunneling gate leakage currents through ultrathin oxides and high-k gate stacks from Si inversion layers
Govoreanu B, Blomme P, Henson K, Van Houdt J, De Meyer K
Solid-State Electronics, 48(4), 617, 2004