화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Mechanism of biaxial alignment in thin films, deposited by magnetron sputtering
Mahieu S, Buyle G, Ghekiere P, Heirwegh S, De Gryse R, Depla D
Thin Solid Films, 515(2), 416, 2006
2 Mechanism of preferential orientation in sputter deposited titanium nitride and yttria-stabilized zirconia layers
Mahieu S, Ghekiere P, De Winter G, Heirwegh S, Depla D, De Gryse R, Lebedev OI, Van Tendeloo G
Journal of Crystal Growth, 279(1-2), 100, 2005