화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Profiling of Silicide Silicon Structures Using a Combination of the Spreading Resistance and Point-Contact Current-Voltage Methods
Heddleson JM, Weinzierl SR, Hillard RJ, Raichoudhury P, Mazur RG
Journal of Vacuum Science & Technology B, 12(1), 317, 1994
2 Detection of Anomalous Defect-Enhanced Diffusion Using Advanced Spreading Resistance Measurements and Analysis
Weinzierl SR, Hillard RJ, Heddleson JM, Raichoudhury P, Mazur RG, Osburn CM
Journal of Vacuum Science & Technology B, 12(1), 322, 1994
3 Accurate Profiling of Ultra-Shallow Implants with Mercury Gate Metal-Oxide-Semiconductor Capacitance-Voltage
Ledudal R, Hillard RJ, Heddleson JM, Weinzierl SR, Raichoudhury P, Mazur RG
Journal of Vacuum Science & Technology B, 12(1), 336, 1994