검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
In situ plasma diagnostics study of a commercial high-power hollow cathode magnetron deposition tool Meng L, Raju R, Flauta R, Shin H, Ruzic DN, Hayden DB Journal of Vacuum Science & Technology A, 28(1), 112, 2010 |
| 2 |
Characterization of magnetron-sputtered partially ionized deposition as a function of metal and gas species Allain MMC, Hayden DB, Juliano DR, Ruzic DN Journal of Vacuum Science & Technology A, 18(3), 797, 2000 |
| 3 |
Characterization of magnetron-sputtered partially ionized aluminum deposition Hayden DB, Juliano DR, Green KM, Ruzic DN, Weiss CA, Ashtiani KA, Licata TJ Journal of Vacuum Science & Technology A, 16(2), 624, 1998 |