검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Dopant measurements in semiconductors with atom probe tomography Ronsheim PA, Hatzistergos M, Jin S Journal of Vacuum Science & Technology B, 28(1), C1E1, 2010 |
| 2 |
Impurity measurements in silicon with D-SIMS and atom probe tomography Ronsheim P, Flaitz P, Hatzistergos M, Molella C, Thompson K, Alvis R Applied Surface Science, 255(4), 1547, 2008 |
| 3 |
Spectroscopic ellipsometry (SE) and grazing X-ray reflectometry (GXR) analyses on tungsten carbide films for diffusion barrier in copper metallization schemes Sun LC, Fouere JC, Sammet T, Hatzistergos M, Efstathiadis H Thin Solid Films, 455-56, 519, 2004 |