화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Comparison of contact radius models for ultrashallow spreading resistance profiles
Hartford EJ, Ramey SM, Ye CW, Hartford CL
Journal of Vacuum Science & Technology B, 18(1), 401, 2000
2 High-resolution damage depth profiles of unannealed sub-100 nm B+ implants in (100) silicon
Hartford CL, Hillard RJ, Mazur RG, Foad MA
Journal of Vacuum Science & Technology B, 16(1), 316, 1998
3 Evaluation of diamond-ground beveled surfaces with Hg gate capacitance-voltage and current-voltage
Hillard RJ, Sherbondy JC, Hartford CL, Weinzierl SR, Maur RG
Journal of Vacuum Science & Technology B, 16(1), 411, 1998