검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Microstructure and thermal stability of aluminum nitride thin films deposited at low temperature on silicon Harris KK, Gila BP, Deroaches J, Lee KN, MacKenzie JD, Abernathy CR, Ren F, Pearton SJ Journal of the Electrochemical Society, 149(2), G128, 2002 |