화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Chemical mechanical polishing of Ta
Hariharaputhiran M, Li Y, Ramarajan S, Babu SV
Electrochemical and Solid State Letters, 3(2), 95, 2000
2 Effect of pH and ionic strength on chemical mechanical polishing of tantalum
Ramarajan S, Li Y, Hariharaputhiran M, Her YS, Babu SV
Electrochemical and Solid State Letters, 3(5), 232, 2000
3 Hydroxyl radical formation in H2O2-amino acid mixtures and chemical mechanical polishing of copper
Hariharaputhiran M, Zhang J, Ramarajan S, Keleher JJ, Li YZ, Babu SV
Journal of the Electrochemical Society, 147(10), 3820, 2000
4 The settling of spheres in a viscoplastic fluid
Hariharaputhiran M, Subramanian RS, Campbell GA, Chhabra RP
Journal of Non-Newtonian Fluid Mechanics, 79(1), 87, 1998