검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Strategy for silicon based hot-wire chemical vapor deposition without wire silicide formation Laukart A, Harig T, Hofer M, Schafer L Thin Solid Films, 575, 38, 2015 |
| 2 |
Modeling of gas flow and deposition profile in HWCVD processes Pflug A, Hofer M, Harig T, Armgardt M, Britze C, Siemers M, Melzig T, Schafer L Thin Solid Films, 595, 266, 2015 |