검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Optical-Emission Spectroscopy of High-Density Metal Plasma Formed During Magnetron Sputtering Radzimski ZJ, Hankins OE, Cuomo JJ, Posadowski WP, Shingubara S Journal of Vacuum Science & Technology B, 15(2), 202, 1997 |
| No. | Article |
|---|---|
| 1 |
Optical-Emission Spectroscopy of High-Density Metal Plasma Formed During Magnetron Sputtering Radzimski ZJ, Hankins OE, Cuomo JJ, Posadowski WP, Shingubara S Journal of Vacuum Science & Technology B, 15(2), 202, 1997 |