검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High-Voltage Electron-Beam Nanolithography on WO3 Carcenac F, Vieu C, Haghirigosnet AM, Simon G, Mejias M, Launois H Journal of Vacuum Science & Technology B, 14(6), 4283, 1996 |
| 2 |
Evaluation of a Diamond-Based X-Ray Mask for High-Resolution X-Ray Proximity Lithography Ravet MF, Rousseaux F, Chen Y, Haghirigosnet AM, Carcenac F, Decanini D, Bourneix J, Launois H, Bachmann PK, Lade H, Wiechert DU, Wilson H Journal of Vacuum Science & Technology B, 13(6), 3055, 1995 |
| 3 |
Fabrication of Sub-30 nm Masks for X-Ray Nanolithography Haghirigosnet AM, Vieu C, Simon G, Carcenac F, Madouri A, Chen Y, Rousseaux F, Launois H Journal of Vacuum Science & Technology B, 13(6), 3066, 1995 |
| 4 |
Fabrication of 150-nm Gate-Length High-Electron-Mobility Transistors Using X-Ray-Lithography Haghirigosnet AM, Lafontaine H, Jin Y, Rousseaux F, Chaker M, Pepin H, Launois H Journal of Vacuum Science & Technology B, 12(6), 3970, 1994 |