검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fabrication of three-dimensional structures of resist by proton beam writing Furuta Y, Uchiya N, Nishikawa H, Haga J, Sato T, Oikawa M, Ishii Y, Kamiya T Journal of Vacuum Science & Technology B, 25(6), 2171, 2007 |
| No. | Article |
|---|---|
| 1 |
Fabrication of three-dimensional structures of resist by proton beam writing Furuta Y, Uchiya N, Nishikawa H, Haga J, Sato T, Oikawa M, Ishii Y, Kamiya T Journal of Vacuum Science & Technology B, 25(6), 2171, 2007 |