검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Thirty years of rotatable magnetrons De Gryse R, Haemers J, Leroy WP, Depla D Thin Solid Films, 520(18), 5833, 2012 |
| 2 |
Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide Musschoot J, Deduytsche D, Poelman H, Haemers J, Van Meirhaeghe RL, Van den Berghe S, Detavernier C Journal of the Electrochemical Society, 156(7), P122, 2009 |
| 3 |
Hysteresis behavior during reactive magnetron sputtering of A(2)O(3) using a rotating cylindrical magnetron Depla D, Haemers J, Buyle G, De Gryse R Journal of Vacuum Science & Technology A, 24(4), 934, 2006 |
| 4 |
Discharge voltage measurements during reactive sputtering of oxides Depla D, Haemers J, De Gryse R Thin Solid Films, 515(2), 468, 2006 |
| 5 |
Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge Buyle G, Depla D, Eufinger K, Haemers J, De Gryse R, De Bosscher W Journal of Vacuum Science & Technology A, 21(4), 1218, 2003 |
| 6 |
Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings Lippens P, Segers A, Haemers J, De Gryse R Thin Solid Films, 317(1-2), 405, 1998 |
| 7 |
Yttria-Stabilized Zirconia Thin-Films Grown by RF Magnetron Sputtering from an Oxide Target Tomaszewski H, Haemers J, Deroo N, Denul J, Degryse R Thin Solid Films, 293(1-2), 67, 1997 |
| 8 |
Yttria-Stabilized Zirconia Thin-Films Grown by RF Magnetron Sputtering from an Oxide Target (Vol 293, Pg 67, 1997) Tomaszewski H, Haemers J, Deroo N, Denul J, Degryse R Thin Solid Films, 305(1-2), 358, 1997 |
| 9 |
Yttria-Stabilized Zirconia Thin-Films Grown by Reactive RF Magnetron Sputtering (Vol 287, Pg 104, 1996) Tomaszewski H, Haemers J, Denul J, Deroo N, Degryse R Thin Solid Films, 306(1), 178, 1997 |
| 10 |
Yttria-Stabilized Zirconia Thin-Films Grown by Reactive RF Magnetron Sputtering Tomaszewski H, Haemers J, Denul J, Deroo N, Degryse R Thin Solid Films, 287(1-2), 104, 1996 |