화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Enhanced diffusion as a mechanism for ion-induced damage propagation in GaN
Haberer ED, Chen CH, Hansen M, Keller S, DenBaars SP, Mishra UK, Hu EL
Journal of Vacuum Science & Technology B, 19(3), 603, 2001
2 Cl-2 reactive ion etching for gate recessing of AlGaN/GaN field-effect transistors
Chen CH, Keller S, Haberer ED, Zhang LD, DenBaars SP, Hu EL, Mishra UK, Wu YF
Journal of Vacuum Science & Technology B, 17(6), 2755, 1999