검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of oxygen plasma exposure of porous spin-on-glass films Kondoh E, Asano T, Nakashima A, Komatu M Journal of Vacuum Science & Technology B, 18(3), 1276, 2000 |
| No. | Article |
|---|---|
| 1 |
Effect of oxygen plasma exposure of porous spin-on-glass films Kondoh E, Asano T, Nakashima A, Komatu M Journal of Vacuum Science & Technology B, 18(3), 1276, 2000 |