검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Measurements of rf bias effect in a dual electron cyclotron resonance-rf methane plasma using the Langmuir probe method Hong JG, Granier A, Leteinturier C, Peignon MC, Turban G Journal of Vacuum Science & Technology A, 18(2), 497, 2000 |