검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Remote plasma chemical vapor deposition silicon oxynitride thin films : Dielectric properties Velez MH, Garrido OS, Gutierrez FF, Falcony C, Duart JMM Journal of Vacuum Science & Technology B, 16(3), 1087, 1998 |
| No. | Article |
|---|---|
| 1 |
Remote plasma chemical vapor deposition silicon oxynitride thin films : Dielectric properties Velez MH, Garrido OS, Gutierrez FF, Falcony C, Duart JMM Journal of Vacuum Science & Technology B, 16(3), 1087, 1998 |