검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Experimental model of industrial x-ray source MSX-1 with a vacuum spark for x-ray lithography Semyonov OG, Gurey AE, Tikhomirov AA Journal of Vacuum Science & Technology B, 19(2), 482, 2001 |
| 2 |
Applications of micropinch x-ray source Semyonov OG, Gurey AE, Kanavin AP, Tikhomirov AA Journal of Vacuum Science & Technology B, 19(4), 1235, 2001 |