검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping Guillorn M, Chang J, Fuller N, Patel J, Darnon M, Pyzyna A, Joseph E, Engelmann S, Ott J, Newbury J, Klaus D, Bucchignano J, Joshi P, Scerbo C, Kratschmer E, Graham W, To B, Parisi J, Zhang Y, Haensch W Journal of Vacuum Science & Technology B, 27(6), 2588, 2009 |