검색결과 : 2건
No. | Article |
---|---|
1 |
Polysilicon sealed vacuum cavities for microelectromechanical systems Zook JD, Herb WR, Ahn Y, Guckel H Journal of Vacuum Science & Technology A, 17(4), 2286, 1999 |
2 |
Micromechanics via X-Ray Assisted Processing Guckel H, Skrobis KJ, Klein J, Christenson TR Journal of Vacuum Science & Technology A, 12(4), 2559, 1994 |