검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ge nanocrystals in HfO2/SiN dielectric stacks by low energy ion beam synthesis Carrada M, Sahu BS, Bonafos C, Gloux F, Groenen J, Muller D, Slaoui A Thin Solid Films, 543, 94, 2013 |
| No. | Article |
|---|---|
| 1 |
Ge nanocrystals in HfO2/SiN dielectric stacks by low energy ion beam synthesis Carrada M, Sahu BS, Bonafos C, Gloux F, Groenen J, Muller D, Slaoui A Thin Solid Films, 543, 94, 2013 |