검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Measurement and error evaluation of electrical parameters at plasma relevant frequencies and impedances Garvin C, Grimard D, Grizzle J, Gilchrist BE Journal of Vacuum Science & Technology A, 16(2), 595, 1998 |
| No. | Article |
|---|---|
| 1 |
Measurement and error evaluation of electrical parameters at plasma relevant frequencies and impedances Garvin C, Grimard D, Grizzle J, Gilchrist BE Journal of Vacuum Science & Technology A, 16(2), 595, 1998 |