검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sub-100 nm silicon on insulator complimentary metal-oxide semiconductor transistors by deep ultraviolet optical lithography Fritze M, Burns J, Wyatt PW, Chen CK, Gouker P, Chen CL, Keast C, Astolfi D, Yost D, Preble D, Curtis A, Davis P, Cann S, Deneault S, Liu HY Journal of Vacuum Science & Technology B, 18(6), 2886, 2000 |