검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Conformal metal thin-film coatings in high-aspect-ratio trenches using a self-sputtered rf-driven plasma source Ji L, Kim JK, Ji Q, Leung KN, Chen Y, Gough RA Journal of Vacuum Science & Technology B, 25(4), 1227, 2007 |
| 2 |
Plasma source for ion and electron beam lithography Lee Y, Gough RA, Leung KN, Vujic J, Williams MD, Zahir N, Fallman W, Tockler M, Bruenger W Journal of Vacuum Science & Technology B, 16(6), 3367, 1998 |
| 3 |
Development of Ion Sources for Ion Projection Lithography Lee Y, Gough RA, Kunkel WB, Leung KN, Perkins LT, Pickard DS, Sun L, Vujic J, Williams MD Journal of Vacuum Science & Technology B, 14(6), 3947, 1996 |