검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Characterization of Ge gradients in SiGeHBTs by AES depth profile simulation Kruger D, Penkov A, Yamamoto Y, Goryachko A, Tillack B Applied Surface Science, 224(1-4), 51, 2004 |
| 2 |
Development of spectroscopic ellipsometry as in-line control for CoSALICIDE process Fursenko O, Bauer J, Goryachko A, Bolze D, Zaumseil P, Krugera D, Wolansky D, Bugiel E, Tillack B Thin Solid Films, 450(2), 248, 2004 |
| 3 |
Thermal stability of Pr2O3 films grown on Si(100) substrate Goryachko A, Liu JP, Kruger D, Osten HJ, Bugiel E, Kurps R, Melnik V Journal of Vacuum Science & Technology A, 20(6), 1860, 2002 |
| 4 |
Improved Auger electron spectroscopy sputter depth profiling of W/WNx and WSix layers on Si substrates Goryachko A, Kruger D, Kurps R, Weidner G, Pomplun K Journal of Vacuum Science & Technology A, 19(5), 2174, 2001 |