검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Assembled microelectromechanical system microcolumns for miniature scanning electron microscopies Saini R, Jandric Z, Gory I, Mentink SAM, Tuggle D Journal of Vacuum Science & Technology B, 24(2), 813, 2006 |
| 2 |
Tribological and wear studies of coatings fabricated by atomic layer deposition and by successive ionic layer adsorption and reaction for microelectromechanical devices Nistorica C, Liu JF, Gory I, Skidmore GD, Mantiziba FM, Gnade BE, Kim J Journal of Vacuum Science & Technology A, 23(4), 836, 2005 |
| 3 |
Layer-by-layer deposition of zirconium oxide films from aqueous solutions for friction reduction in silicon-based micro electromechanical system devices Liu JF, Nistorica C, Gory I, Skidmore G, Mantiziba FM, Gnade BE Thin Solid Films, 492(1-2), 6, 2005 |