검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge Gorelick S, Sajavaara T, Whitlow HJ Journal of Vacuum Science & Technology B, 27(3), 1101, 2009 |
| 2 |
Aperture-edge scattering in MeV ion-beam lithography. II. Scattering from a rectangular aperture Gorelick S, Sajavaara T, Whitlow HJ Journal of Vacuum Science & Technology B, 27(3), 1109, 2009 |
| 3 |
Programmable proximity aperture lithography with MeV ion beams Puttaraksa N, Gorelick S, Sajavaara T, Laitinen M, Singkarat S, Whitlow HJ Journal of Vacuum Science & Technology B, 26(5), 1732, 2008 |