검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin films Ruffner JA, Clem PG, Tuttle BA, Dimos D, Gonzales DM Thin Solid Films, 354(1-2), 256, 1999 |
| No. | Article |
|---|---|
| 1 |
Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin films Ruffner JA, Clem PG, Tuttle BA, Dimos D, Gonzales DM Thin Solid Films, 354(1-2), 256, 1999 |