검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Low-temperature low-resistivity PEALD TiN using TDMAT under hydrogen reducing ambient Caubet P, Blomberg T, Benaboud R, Wyon C, Blanquet E, Gonchond JP, Juhel M, Bouvet P, Gros-Jean M, Michailos J, Richard C, Iteprat B Journal of the Electrochemical Society, 155(8), H625, 2008 |
| 2 |
X-ray metrology for advanced silicon processes Wyon C, Gonchond JP, Delille D, Michallet A, Royer JC, Kwakman L, Marthon S Applied Surface Science, 253(1), 21, 2006 |
| 3 |
In-line monitoring of advanced microelectronic processes using combined X-ray techniques Wyon C, Delille D, Gonchond JP, Heider F, Kwakman L, Marthon S, Mazor I, Michallet A, Muyard D, Perino-Gallice L, Royer JC, Tokar A Thin Solid Films, 450(1), 84, 2004 |
| 4 |
TiSi2 Integration in a Submicron CMOS Process .2. Integration Issues Kalnitsky A, Brun N, Brun A, Gonchond JP Journal of the Electrochemical Society, 142(6), 1992, 1995 |