검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Gas-efficient deposition of device-quality hydrogenated amorphous silicon using low gas flows and power modulated radio-frequency discharges Biebericher ACW, van der Weg WF, Rath JK, Akdim MR, Goedheer WJ Journal of Vacuum Science & Technology A, 21(1), 156, 2003 |
| 2 |
An alternative quantitative analysis of non-equilibrium transport coefficients in argon plasmas Burm KTAL, Goedheer WJ, Schram DC Plasma Chemistry and Plasma Processing, 22(3), 413, 2002 |