검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Transient adsorption and desorption in micrometer scale features Gobbert MK, Webster SG, Cale TS Journal of the Electrochemical Society, 149(8), G461, 2002 |
| 2 |
Modeling and simulation of atomic layer deposition at the feature scale Gobbert MK, Prasad V, Cale TS Journal of Vacuum Science & Technology B, 20(3), 1031, 2002 |
| 3 |
Predictive modeling of atomic layer deposition on the feature scale Gobbert MK, Prasad V, Cale TS Thin Solid Films, 410(1-2), 129, 2002 |
| 4 |
Multiple scale integrated modeling of deposition processes Merchant TP, Gobbert MK, Cale TS, Borucki LJ Thin Solid Films, 365(2), 368, 2000 |
| 5 |
A Multiscale Simulator for Low-Pressure Chemical-Vapor-Deposition Gobbert MK, Merchant TP, Borucki LJ, Cale TS Journal of the Electrochemical Society, 144(11), 3945, 1997 |
| 6 |
Mesoscopic Scale Modeling of Microloading During Low-Pressure Chemical-Vapor-Deposition Gobbert MK, Ringhofer CA, Cale TS Journal of the Electrochemical Society, 143(8), 2624, 1996 |