검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low- and high-resistivity silicon substrate characterization using the Al/silicon-rich oxide/Si structure with comparison to the metal oxide semiconductor technique Luna-Lopez A, Aceves-Mijares M, Malik O, Glaenzer R Journal of Vacuum Science & Technology A, 23(3), 534, 2005 |
| 2 |
Modeling the Al/Si rich oxide (SRO)/Si structure Aceves M, Glaenzer R, Carrillo J, Malik A, Luna A Journal of Vacuum Science & Technology B, 20(5), 1808, 2002 |