검색결과 : 3건
No. | Article |
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1 |
Morphological evolution of III-V semiconductors and SiO2 during low energy electron enhanced dry etching Lee SH, Ho RM, Goorsky MS, Gillis HP, Margolese DI, Demine MA, Anz SJ Journal of Vacuum Science & Technology A, 22(4), 1600, 2004 |
2 |
Growth and characterization of diamond-like carbon films by pulsed laser deposition and hydrogen beam treatment Stavrides A, Ren J, Ho M, Cheon J, Zink J, Gillis HP, Williams RS Thin Solid Films, 335(1-2), 27, 1998 |
3 |
Low-Energy Electron-Enhanced Etching of GaN/Si in Hydrogen Direct-Current Plasma Gillis HP, Choutov DA, Martin KP, Pearton SJ, Abernathy CR Journal of the Electrochemical Society, 143(11), L251, 1996 |