화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Morphological evolution of III-V semiconductors and SiO2 during low energy electron enhanced dry etching
Lee SH, Ho RM, Goorsky MS, Gillis HP, Margolese DI, Demine MA, Anz SJ
Journal of Vacuum Science & Technology A, 22(4), 1600, 2004
2 Growth and characterization of diamond-like carbon films by pulsed laser deposition and hydrogen beam treatment
Stavrides A, Ren J, Ho M, Cheon J, Zink J, Gillis HP, Williams RS
Thin Solid Films, 335(1-2), 27, 1998
3 Low-Energy Electron-Enhanced Etching of GaN/Si in Hydrogen Direct-Current Plasma
Gillis HP, Choutov DA, Martin KP, Pearton SJ, Abernathy CR
Journal of the Electrochemical Society, 143(11), L251, 1996