검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Model for aspect ratio dependent etch modulated processing Gilgunn PJ, Alfaro JF, Fedder GK Journal of Vacuum Science & Technology A, 28(2), 334, 2010 |
| No. | Article |
|---|---|
| 1 |
Model for aspect ratio dependent etch modulated processing Gilgunn PJ, Alfaro JF, Fedder GK Journal of Vacuum Science & Technology A, 28(2), 334, 2010 |