검색결과 : 1건
No. | Article |
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1 |
Single ion implantation with scanning probe alignment Persaud A, Allen FI, Giccluel F, Park SJ, Liddle JA, Schenkel T, Ivanov T, Ivanova K, Rangelow IW, Bokor J Journal of Vacuum Science & Technology B, 22(6), 2992, 2004 |