검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fullerene resist materials for the 32nm node and beyond Gibbons FP, Robinson APG, Palmer RE, Diegoli S, Manickam M, Preece JA Advanced Functional Materials, 18(13), 1977, 2008 |
| No. | Article |
|---|---|
| 1 |
Fullerene resist materials for the 32nm node and beyond Gibbons FP, Robinson APG, Palmer RE, Diegoli S, Manickam M, Preece JA Advanced Functional Materials, 18(13), 1977, 2008 |