화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Silicon oxynitride layers for optical waveguide applications
Germann R, Salemink HWM, Beyeler R, Bona GL, Horst F, Massarek I, Offrein BJ
Journal of the Electrochemical Society, 147(6), 2237, 2000
2 Fabrication of Curved Mirrors for Visible Semiconductor-Lasers Using Electron-Beam Lithography and Chemically Assisted Ion-Beam Etching
Unger P, Boegli V, Buchmann P, Germann R
Journal of Vacuum Science & Technology B, 11(6), 2514, 1993