검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Round-robin study of arsenic implant dose measurement in silicon by SIMS Simons D, Kim K, Benbalagh R, Bennett J, Chew A, Gehre D, Hasegawa T, Hitzman C, Ko J, Lindstrom R, MacDonald B, Magee C, Montgomery N, Peres P, Ronsheim P, Yoshikawa S, Schuhmacher M, Stockwell W, Sykes D, Tomita A, Toujou F, Won J Applied Surface Science, 252(19), 7232, 2006 |
| 2 |
Effect of nitrogen content on the degradation mechanisms of thin Ta-Si-N diffusion barriers for Cu metallization Hubner R, Hecker M, Mattern N, Hoffmann V, Wetzig K, Heuer H, Wenzel C, Engelmann HJ, Gehre D, Zschech E Thin Solid Films, 500(1-2), 259, 2006 |