검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Recoil implantation of boron into silicon for ultrashallow junction formation : Modeling, fabrication, and characterization Liu HL, Gearhart SS, Booske JH, Wang W Journal of Vacuum Science & Technology B, 16(1), 415, 1998 |
| No. | Article |
|---|---|
| 1 |
Recoil implantation of boron into silicon for ultrashallow junction formation : Modeling, fabrication, and characterization Liu HL, Gearhart SS, Booske JH, Wang W Journal of Vacuum Science & Technology B, 16(1), 415, 1998 |