검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Self-organized nanomolecular films on low-dielectric constant porous methyl silsesquioxane at room temperature Hu JC, Wu CW, Gau WC, Chen CP, Chen LJ, Li CH, Chang TC, Chu CJ Journal of the Electrochemical Society, 150(4), F61, 2003 |
| 2 |
Metal-organic chemical vapor deposition of NbxTa(1-x)NyOmCn films as diffusion barriers for Cu metallization Gau WC, Wu CW, Chang TC, Liu PT, Chu CJ, Chen CH, Chen LJ Thin Solid Films, 420-421, 548, 2002 |
| 3 |
Copper electroplating for future ultralarge scale integration interconnection Gau WC, Chang TC, Lin YS, Hu JC, Chen LJ, Chang CY, Cheng CL Journal of Vacuum Science & Technology A, 18(2), 656, 2000 |
| 4 |
Copper electroplating for future ultralarge scale integration interconnection (vol 18, pg 656, 2000) Gau WC, Chang TC, Lin YS, Hu JC, Chen LJ, Chang CY, Cheng CL Journal of Vacuum Science & Technology A, 18(5), 2597, 2000 |