검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chlorinated precursor study in low temperature chemical vapor deposition of 4H-SiC Leone S, Beyer FC, Pedersen H, Andersson S, Kordina O, Henry A, Janzen E Thin Solid Films, 519(10), 3074, 2011 |
| No. | Article |
|---|---|
| 1 |
Chlorinated precursor study in low temperature chemical vapor deposition of 4H-SiC Leone S, Beyer FC, Pedersen H, Andersson S, Kordina O, Henry A, Janzen E Thin Solid Films, 519(10), 3074, 2011 |