검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Industrial batch process monitoring with limited data Tulsyan A, Garvin C, Undey C Journal of Process Control, 77, 114, 2019 |
| 2 |
Advances in industrial biopharmaceutical batch process monitoring: Machine-learning methods for small data problems Tulsyan A, Garvin C, Undey C Biotechnology and Bioengineering, 115(8), 1915, 2018 |
| 3 |
Real-time reactive ion etch metrology techniques to enable in situ response surface process characterization Klimecky P, Garvin C, Galarza CG, Stutzman BS, Khargonekar PP, Terry FL Journal of the Electrochemical Society, 148(1), C34, 2001 |
| 4 |
Demonstration of broadband radio frequency sensing: Empirical polysilicon etch rate estimation in a Lam 9400 etch tool Garvin C, Grizzle JW Journal of Vacuum Science & Technology A, 18(4), 1297, 2000 |
| 5 |
Advances in broadband radio-frequency sensing for real-time control of plasma-based semiconductor processing Garvin C, Grimard DS, Grizzle JW Journal of Vacuum Science & Technology A, 17(4), 1377, 1999 |
| 6 |
Control of ion energy in a capacitively coupled reactive ion etcher Park HM, Garvin C, Grimard DS, Grizzle JW Journal of the Electrochemical Society, 145(12), 4247, 1998 |
| 7 |
Measurement and error evaluation of electrical parameters at plasma relevant frequencies and impedances Garvin C, Grimard D, Grizzle J, Gilchrist BE Journal of Vacuum Science & Technology A, 16(2), 595, 1998 |