검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Synthesis and characterization of porous silica thin films deposited from MCM-41 evaporation Velez MH, Garrido OS, Barbeyto RMB, Shmytko IM, Poza MMG, Burgos LV, Martinez-Duart JM, Ruiz-Hitzky E Thin Solid Films, 402(1-2), 111, 2002 |
| 2 |
Remote plasma chemical vapor deposition silicon oxynitride thin films : Dielectric properties Velez MH, Garrido OS, Gutierrez FF, Falcony C, Duart JMM Journal of Vacuum Science & Technology B, 16(3), 1087, 1998 |