검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Anisotropic etching of CoFeB magnetic thin films in C2H5OH/Ar plasma Choi JS, Garay AA, Hwang SM, Lee JY, Cho DH, Chung CW Thin Solid Films, 637, 49, 2017 |
| 2 |
Etch characteristics of Ru thin films using O-2/Ar, CH4/Ar, and O-2/CH4/Ar plasmas Hwang SM, Garay AA, Choi JH, Chung CW Thin Solid Films, 615, 311, 2016 |