검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Residual stress and adhesion experiment on the capacitive MEMS power sensor based on GaAs MMIC process Wang KY, Liao XP, Zhang ZQ Journal of Adhesion Science and Technology, 30(8), 803, 2016 |
| 2 |
A high dynamic range power sensor based on GaAs MMIC process and MEMS technology Yi ZX, Liao XP Solid-State Electronics, 115, 39, 2016 |
| 3 |
Investigation of the adhesion of perforated MEMS clamped-clamped beams based on the GaAs MMIC process with the resonant method Wang KY, Liao XP, Zhang ZQ Journal of Adhesion Science and Technology, 29(16), 1663, 2015 |