검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Changes in morphology using atomic hydrogen during Si/Si1-xGex molecular beam epitaxy growth on Si (100) Silvestre C, Jernigan GG, Twigg ME, Thompson PE Journal of Vacuum Science & Technology B, 16(4), 1933, 1998 |
| 2 |
Effects of atomic hydrogen on growth behavior of Si films by Si2H6-source molecular beam epitaxy Yasuda Y, Matsuyama T, Sato K, Kondo M, Ikeda H, Zaima S Thin Solid Films, 317(1-2), 48, 1998 |
| 3 |
Atomic hydrogen for the formation of abrupt Sb doping profiles in MBE-grown Si Thompson PE, Silvestre C, Twigg M, Jernigan G, Simons DS Thin Solid Films, 321(1-2), 120, 1998 |