검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ill-V surface plasma nitridation: A challenge for III-V nitride epigrowth Losurdo M, Capezzuto P, Bruno G, Leo G, Irene EA Journal of Vacuum Science & Technology A, 17(4), 2194, 1999 |
| 2 |
Ill-nitride dry etching: Comparison of inductively coupled plasma chemistries Cho H, Hahn YB, Hays DC, Abernathy CR, Donovan SM, MacKenzie JD, Pearton SJ, Han J, Shul RJ Journal of Vacuum Science & Technology A, 17(4), 2202, 1999 |