검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
SIMS quantification of low concentration of nitrogen doped in silicon crystals Fujiyama N, Karen A, Sams DB, Hockett RS, Shingu K, Inoue N Applied Surface Science, 203, 457, 2003 |
| 2 |
SIMS depth profile of copper in low-k dielectrics under electron irradiation for charge compensation Yamada K, Fujiyama N, Sameshima J, Kamoto R, Karen A Applied Surface Science, 203, 512, 2003 |