검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Experimental study of the degradation of mechanical strength of silicon wafers caused by large scale integration processes Yagishita A, Fujii O, Numano M, Kawamura N, Iwase M, Ushiku Y, Arikado T Journal of the Electrochemical Society, 145(9), 3160, 1998 |
| 2 |
300 mm Diameter Hydrogen Annealed Silicon-Wafers Takeda R, Xin P, Yoshikawa J, Kirino Y, Matsushita Y, Hosoki Y, Tsuchiya N, Fujii O Journal of the Electrochemical Society, 144(10), L280, 1997 |